ACM Research (Shanghai) · 盛美半导体设备（上海）股份有限公司

Cleaning, Deposition (PECVD), ECP

China-based subsidiary of NASDAQ-listed ACM Research — its Shanghai and Korea units were both added to the Entity List in the same December 2024 action tha…
Published

October 11, 2026

Chinese name: 盛美半导体设备（上海）股份有限公司 (Shèngměi Bàndǎotǐ Shèbèi (Shànghǎi) Gǔfèn Yǒuxiàn Gōngsī)

TipWhy This Matters

China-based subsidiary of NASDAQ-listed ACM Research — its Shanghai and Korea units were both added to the Entity List in the same December 2024 action that named Naura, illustrating how a dual-listed structure doesn’t shield the China-based operating unit. 2025 full-year revenue reached ¥6.786 billion (+20.8% YoY) with net profit of ¥1.396 billion (+21.1% YoY); 2026 guidance was raised to $1.125-1.175 billion in revenue (+25-30% YoY), with management citing electroplating (ECP) demand and H1 2026 order growth of 105% year-on-year, concentrated in advanced packaging.

What does this firm supply?

Wafer cleaning systems, electrochemical plating (ECP) tools, PECVD deposition, furnace, and track platforms — several adjacent front-end process categories beyond its original cleaning-tool business.

Key Facts

Category Equipment
Segment Cleaning, Deposition (PECVD), ECP
Node Capability Not disclosed at a specific node; tools sold across mature and advanced-node fab lines
Founded 2005
HQ Shanghai
Capacity Planned: 3,000 USD million annual output capacity (Lingang, two buildings at full build), as of 2026-02 — company-stated maximum output value supported by both Lingang buildings; only building A in use
Entity List Yes — US Commerce BIS
Last Verified Not recorded (newest source dated Aug 2026)

Capability Trajectory

  • 2011: First 12-inch single-wafer (SAPS megasonic) cleaning tool wins volume order from SK hynix
  • 2019: First Ultra-C Tahoe cleaning tool delivered for evaluation; Ultra ECP MAP front-end Cu plating launched
  • 2025: 300 WPH KrF track delivered for evaluation (Sept 2025); PECVD/furnace (LPCVD, ALD) ramping

Manufacturing Sites in China

  • ACM Shanghai Lingang R&D and Manufacturing Center (Shanghai (Lingang New Area)) — Primary production centre for cleaning, ECP, furnace, PECVD, track tools; 138,000 m2 total, 40,000 m2 factory (bldg A in use, B reserved); opened Oct 2024
  • ACM Shanghai Chuansha factory (Shanghai (Chuansha, Pudong)) — Former main production site; main capacity being moved to Lingang by mid-2025

Sources

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