AMEC (Advanced Micro-Fabrication Equipment) · 中微半导体设备（上海）股份有限公司

Etch, Deposition (MOCVD)

Founded by veteran semiconductor engineer Dr.
Published

October 11, 2026

Chinese name: 中微半导体设备（上海）股份有限公司 (Zhōngwēi Bàndǎotǐ Shèbèi (Shànghǎi) Gǔfèn Yǒuxiàn Gōngsī)

TipWhy This Matters

Founded by veteran semiconductor engineer Dr. Gerald Yin (尹志尧) in May 2004 — not on the US Entity List as of the sources checked for this tracker, notable given how central etch tools are to advanced-node manufacturing. H1 2026 revenue reached ¥6.691 billion (+34.9% year-on-year) with net profit of ¥2.825 billion, up roughly 300% year-on-year; the company reported several key etch processes for advanced logic and memory devices reaching mass production during the half, and a second Lingang, Shanghai facility was reportedly being planned.

What does this firm supply?

Plasma etching systems (Capacitively Coupled Plasma and Inductively Coupled Plasma, under the Primo brand) and MOCVD deposition tools used in compound semiconductor and LED manufacturing.

Key Facts

Category Equipment
Segment Etch, Deposition (MOCVD)
Node Capability Plasma etch tools (Primo CCP/ICP series) in use down to 5nm at some customers, per company statements
Founded 2004
HQ Shanghai
Capacity Not yet recorded
Entity List No
Last Verified Not recorded (newest source dated Sep 2026)

Capability Trajectory

  • 2021: Etch tools on tier-1 lines 65nm to 5nm; 12-inch etch used for key 5nm/sub-5nm steps
  • 2021: 1,500th CCP etch reaction chamber shipped; products used at 5nm and below
  • 2025: Advanced-logic MOL etch and memory ultra-high-aspect-ratio etch in volume; >6,800 etch chambers shipped
  • 2025: LPCVD cumulative shipments pass 300 chambers; RP-epi tools at customers for qualification
  • 2026: >8,800 reaction chambers in volume production on 220+ lines (all tool types)

Manufacturing Sites in China

  • AMEC Lingang industrialisation base (phase I) (Shanghai (Lingang New Area)) — Plasma etch and thin-film deposition tools; ~157 mu, ~180,000 m2; opened Aug 2024
  • AMEC Lingang industrialisation base (phase II, planned) (Shanghai (Lingang New Area)) — Etch, metrology/inspection and thin-film deposition tools; RMB 3.5bn planned investment; ~RMB 3bn annual revenue at full output
  • AMEC Nanchang production and R&D base (Nanchang) — IC and broader semiconductor equipment production (products not specified); 140,000 m2, in use from July 2023
  • AMEC Jinqiao (HQ) R&D and production base (Shanghai (Jinqiao, Pudong)) — R&D and production (products not specified)
  • AMEC Chengdu R&D and production base (under construction) (Chengdu (High-tech Zone)) — Thin-film deposition (CVD, ALD) equipment; phase I ~70,000 m2; production planned 2027
  • AMEC Guangzhou base (under construction) (Guangzhou) — R&D and production (details not disclosed)

Sources

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