SITRI — Shanghai Industrial Technology Research Institute · 上海微技术工业研究院
Shanghai Industrial Technology Research Institute (SITRI) | Research Fab
China’s structural answer to imec — a full-flow 200mm pilot fab (not a lab cleanroom) de-risking the R&D→pilot→industrialization gap for MEMS, silicon photonics and biosensor chips; founded 2013 with the CAS Shanghai microsystems lineage, it has served 1,000+ customers and incubated 20+ companies with aggregate valuation above ¥15 billion, and was named a national ‘little giant’ 专精特新 platform in 2025.
Chinese name: 上海微技术工业研究院 (Shànghǎi Wēijìshù Gōngyè Yánjiūyuàn)
What does this facility make?
Engineering/pilot wafers: MEMS sensors, silicon-photonic chips (built under Shanghai’s municipal SiPh major special project), biosensor chips; PDK-based tape-out services rather than commercial volume.
Why does it matter?
Pilot lines like SITRI’s are the missing middle layer that export controls cannot block as easily as frontier tools — the country’s specialty-silicon innovation capacity increasingly runs through such platforms; it anchors Jiading’s ‘More than Moore’ sensor cluster.
Key Facts
| Company | Shanghai Industrial Technology Research Institute (SITRI) |
| Type | Research Fab |
| Category | State-Backed |
| Capability | China’s first 8-inch ‘More than Moore’ R&D pilot line (online September 2017): MEMS/intelligent sensors, silicon photonics, biochips; ~5,000 sqm cleanroom, 14 standardized process modules, CMOS-compatible |
| Status | Operational |
| Capacity | Not yet recorded |
| Investment | Not disclosed |
| Funding Source | Local Govt |
| Location | Shanghai, Shanghai Municipality |
| Current Node | Not yet researched |
| Entity List | No |
| Equipment Origin | Not yet assessed |
| Last Verified | Not recorded (newest source dated Oct 2026) |
Technical Complexity
2.6/5
Technology Node Trajectory
Node history not yet researched.
Project Timeline
- Nov 2013 — Founded by Shanghai Municipal Commission of STI, Jiading district and Xinwei Group
- Sep 2017 — 8-inch R&D pilot line online — China’s first ‘More than Moore’ pilot fab
- Jul 2018 — Silicon photonics pilot line (municipal major special project) completes, tape-out capability demonstrated
Sources
- SITRI公司简介（国内首条8英寸’超越摩尔’研发中试线） (01 Oct 2026)
- 硅光子市级重大专项获突破 首条研发中试线年内建成 (解放日报转载) (09 Jul 2018)